ORBIS™ Platforms

The new generation of ORBIS platforms enable the most advanced processing capability from research, to commercial R&D through to high-volume manufacturing. The ORBIS platform approach delivers many benefits to our customers, such as:

  • Upgrade paths from R&D through to full-scale production
  • Cost-effective solutions—lab or fab
  • Seamless process transfer—from lab to fab
  • Low cost of ownership
  • End point detection
  • Single wafer processing