Versalock®

Plasma-Therm’s Versalock product line has been an industry standard for cluster based platforms for more than 15 years. With more than 100 installed worldwide, the Versalock is available for production capacity increase or system redundancy when required. Versalock is available with cassette-to-cassette handling in the following configurations: ICP, RIE, DSE™, PECVD and HDPCVD.